組分與濃度

稀釋氣

備注

CH3Br 0.2～0.6%

Kr Ar N2

充裝容器和充裝量根據用戶要求配制

CH3Br 0.1～0.3% Kr 10～30%

N2

CH3Br 0.2～06% Kr 15～50

Ar

CH3Br 0.2～0.5% Kr 10～30% N2 10～40%

Ar

CH3Br 0.2～0.3% Kr 30% Ar 20

N2

CH3Br 0.2～0.5% N2 15%

Ar

CH3Br 0.3～0.5% CH3Cl 0.3～0.5%

Ar

CH3Br 0.2～0.5% CH3Cl 0.1～0.5% Kr 10～20%

Ar

CH3Br 0.1～0.5% CH2Cl2 0.02～0.05%

Kr，N2

CH3Br 0.05～0.1% CH2Cl2 0.01～0.02% Ar 45%

N2

CH2Cl2 0.1～2%

Kr

CH2ClBr 0.02% Ar 10%

Kr

CH3Br 0.1～0.3% CHCl2Br 0.1～0.7% CH2ClBr 0.1～0.3%

Kr

CH3Br 0.3～0.5% CH2Cl2 0.02～0.04% H2 5%

N2

Kr 30～75

Ar

Kr 0.5～5%

Ar

Ne 50～75%

Ar

Kr 3～8% N2 20%

Ar

C2H5I 0.1～2%

Kr